The investigation of Al-based sputtering target by novel powder metallurgy method and its thin film properties - 2013年全国粉末冶金学术会议及海峡两岸粉末冶金技术研讨会.pdf

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会议论文《The investigation of Al-based sputtering target by novel powder metallurgy method and its thin film properties》介绍了采用新型粉末冶金方法制备铝基溅射靶材的研究。该研究通过优化工艺参数,提高了靶材的致密度和均匀性,并分析了其薄膜性能,如表面形貌、电阻率和附着力等。该成果为高性能铝基薄膜材料的制备提供了新思路,具有重要的应用价值。

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The investigation of Al-based sputtering target by novel powder metallurgy method and its thin film properties - 2013年全国粉末冶金学术会议及海峡两岸粉末冶金技术研讨会
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